| Low-temperature plasma technology of Microwave excitation now is the front development of plasma technology application, with low energy consumption, high-efficiency, low-cost, the advantages of large areas. It is particularly applicable to the production of new materials, military affairs, optoelectronic devices in such applications. And microwave electron cyclotron resonance (ECR) is an advanced low-temperature plasma technology, which has good overall indicator to improve microelectronics, Optoelectronic integrated circuits for applications such as manufacturing technology, ultra-large-scale integrated circuits in the field of low-temperature plasma processing. Currently Electron Cyclotron Resonance Microwave technology has been widely applied to the plasma application industry.The core components of ECR microwave plasma application system, reaction chamber has a crucial role to play. It ensures that the power of the microwave cavity formation of a specific distribution model and make it specific configuration of the plasma reaction with the goal to have the most effective interaction to achieve the desired results of experiments, or for processing.The article introduces the general microwave plasma system components and application, analysis the principle of ECR microwave plasma system from electromagnetics angle, discussed the work mechanism of ECR microwave plasma system. Discussed the resonate condition of microwave ECR plasma system and explained the influence of microwave source and magnetic field on resonates condition.The paper designs the coaxial ECR microwave plasma system based on gapped coaxial radiation to improve the performance of metal tube, and analyzes the new system feasibility. Coaxial ECR microwave plasma system is designed, equipment,device and their parameter are also choosen according to specifications, especially the working conditions and geometry. Finally, this paper simulates the energy distribution and the electronic field in this radiator in use of Ansoft HFSS 9.2, the result proves that this system is reasonable and feasible. |
