Microlens Fabrication With Excimer Laser And Diaphragm

A microlens is one of the most important components in optical micro-systems. And a polymeric microlens plays an important role in reducing the size, the weight, and the cost of optical micro-systems. In this paper, we design a new method to fabricate polymeric refractive microlens using an excimer laser and a diaphragm; and using this method we can obtainφ80um-φ100um, F/0.8-F/6.3 microlens. Due to the low beam quality of the excimer laser, a Galilei telescope, two lens arrays and a collection lens is used to homogenize the beam of excimer laser. Using the homogenizer, a uniform plane of the output is obtained. And a projection system (including a mask and a projective lens) with a diaphragm is designed for processing polymeric refractive microlens. Through changing the shape and size of the mask and diaphragm, the shape and size of polymeric refractive microlens are controlled, respectively; and through changing the number of excimer laser pulse, the surface profile of the polymeric refractive microlens is controlled. Using this method can make fabricating polymeric microlens much easily than other method.