Study On Modeling And Compensation For Hysteresis Of Diffused Silicon Pressure Sensor

The diffused silicon pressure sensor is an important device to measure the pressure,which has been widely used in the field of industry, agriculture, meteorology, aviation and so on. With the development of semiconductor technology, the performance of diffused silicon pressure sensor is improving. However, The hysteresis characteristic of diffused silicon sensor is a kind of non-smooth non-linearity with mult-ivalued mapping, which reduces the precision of measurement. Up till now, few authors study the hysteresis of sensors and published literature proved that neural networks can't approximate the hysteresis non-linearity directly. The compensation for the hysteresis of the sensor usually employs the conventional methods, but the methods can't totally meet the requirment of compensation precision. Therefore, a hysteretic operator of simple structure is introduced to establish the hysteresis model and put forward to make intelligent compensation to the hysteresis. Hence, an embedded smart diffused silicon pressure sensor system based on ARM is designed, and the main results are as follows:1. The hysteretic operator based on the input extended space method is proposed to transform the multi-valued mapping into a one-to-one mapping. In this method, a novel hysteretic operator is constructed to extend the input space to establish T-S fuzzy dynamic hysteresis model. It has a rather simple structure,simplifies identification procedure.2. Hysteretic inverse operator which has the simlar functions with hysteresis operator, i.e. transforming the multi-valued mapping into a one-to-one mapping, is proposed. Then, T-S fuzzy dynamic hysteresis inverse model is presented, and nonlinear hysteresis characteristics are compensated by the inverse model behind, which realizes intelligent compensation for the hysteresis.3. On the 32-bits ARM microprocessor EM9000 embedded module, the Windows CE embedded compensation system about the diffused silicon pressure sensor is designed. Then, the system about the diffused silicon pressure sensor is developed, which combines with principle of the compensation. Such reaches the real-time demand of the diffused silicon pressure sensor, four times higher than other method without compensation in precision. Result shows that T-S model is extraordinarily effective.