Control Method Of Kinetic Characteristic Of Eletrostatically Actuated MEMS

The device performance of electrostatically actuated MEMS has always been of concern. The kinetic characteristic of electrostatically actuated MEMS has great significance for improving operating life, operating accuracy, and operating efficiency of MEMS.The merits and faults of voltage control are studied in detail based on the analyses of the work mechanics of parallel plate system, the basic element of the electrostatically actuated MEMS. The state space method is introduced to design the state feedback scheme improving the kinetic characteristic and operating accuracy of parallel plate, without adding processing technic. The module of the scheme is established in Simulink, setting parameter, operating, and evaluating the performance of the scheme in the terms of theory and emulation.The subsystems of electrostatic and mechanism are adequately considered in the state feedback control scheme. For the sake of reducing system damping driven by mechanical subsystem, the state feedback scheme designed by pole assignment and feedback gain, in the state space. The two subsystems are studied discretely in the first time, for using the state space method. Using the state space method in the study of control theory of MEMS is an innovative analysis method.The study and simulation results show that the new control scheme of the kinetic characteristic designed by the state space method can improve the kinetic characteristic and operating accuracy of eletrostatically actuated MEMS effectively, without adding processing technic and cost.