Surface Acoustic Wave Detection Platform For Self-Assembly Monolayers Based Sensors

Surface Acoustic Wave (SAW) gas sensors as one of the most important technologies are attractive because of several advantages, such as: high sensitivity, frequency output, robustness and small size. Self-assembled monolayers are used as sensitive layers with high stability and ordered organization to improve the performance of sensors. Sensors, which are combined the both technologies, are able to measure the gas with high sensitivity, quick response and small size, because of high SAW sensitivity and special self-assembled layers selectivity.In this paper, a gas sensor detection circuit platform combined SAW resonator and self-assembled monolayers is presented. With different self-assembled layers, the platform is able to detect different gases. Because of stability and corrosion proof, Au film is used as a base of self-assembled layers. However, different positions of the Au film cause the different varieties of the SAW devices with Au film. Consequently, the whole performance of the devices is changed.The models of SAW devices are set up and analyzed accurately using coupling-mode (COM) theory. The COM equations are predigested with mixed matrixes. The performances of the devices are obtained by simulated...