Diamond's Manufacture About The Base Of SAW Filter

As the processing information amount of modern electronics increases rapidly ,the carrier wave in communication must move to higher frequency band . Surface acoustic wave filter (SAWF) is one of the key elements in modern wireless mobile-communication system.The central operating frequency of SAWF'f'is defined as f=V/λ,among which V means the SAW speed of the used material ,andλis the wavelength。At present ,it is difficult for SAW devices operating under GHz frequency because of the limitation of materials and fabrication technology.Diamond have a very high acoustic speed ,and it is possible to fabricate GHz SAW devices using piezoelectric films on diamond substrates base on the present technology nowadays in the world,it is competition to fabricate GHz SAW devices using diamond substrates .In the theory of fabrication GHz SAW devices, We deposited diamond films for surface acoustic wave filter's substrates by the method of DC arc plasma jet CVD . The diamond films are structurally analyzed using techniques such as X-ray diffraction,scanning electron microscopy,Roman to determine their crystal structure ,surface morphology and composition distribution .The main results can be described as following:First , we have deposited of diamond films by DC arc plasma jet CVD,and investigated the effects of prophase transact,the base of temperature,the proportion of CH₄ and Ar for performance of diamond films.We have analysed the results of test,too.Finally,under the optimized condition highly property diamond films are fabricated which are suitable for the fabrication of surface acoustic wave device and which are lower granulation after polishing,larger concentration of sp3 and approximately one millimeter thickness .Second,the theory of BlΦtekjar and its developable process were introduced in particular .At last ,the finite element method was introduced too, which is suitable for analyse interdigital transducers (IDT)。...