Investigation Of A 3D Pn Junction Structure For Radiation Energy Conversion Chip

Modern society is experiencing an ever-increasing demand for energy power.As hydrocarbon resources dwindle, utilization of ample nuclear energy and abundant solar energy becomes more and more attractive.However, conventional two-dimensional(2D) planar diode structures exhibit a number of inherent deficiencies that result in relatively low energy-conversion efficiencies. A unique three-dimensional (3D) macroporous silicon p-n diode has been developed to form the basis of a novel betavoltaic battery. This structure has been reported. However, the pores formed by electrochemical etching are distribute on the substrate surface randomly in that paper,which make it impossible to control the output power exactly.In this paper, investigation of a new 3D pn junction based lithograph process was presented and the I-V and C-V was measured to indicate the possible for such a structure as the radiation conversion chip for future portable nuclear power cell.Chapter 1 introduces primary applications, foundation of the isotope cell, and the the outline of the research work in this thesis.. Chapter 2 introduces the structure of isotope microbattery and current generation mechanism of isotoue microbattery. Deduce the equations of voltage and short circuit current.Chapter 3 the process for a novel 3D pn junction structure is investigated. The details for the experiments of this paper are presented.Chapter 4 studies the influence of the electrochemistry parameters to the electrochemical etching process for P type macroporous silicon, which the concentration of the solutions, bias voltage, back-side illumination, have been explored to the pore diameter, surface morphology etc.In Chapter 5 I-V and C-V was measured to indicate the possible for such a structure as the radiation conversion chip for future portable nuclear power cell.The last chapter, Chapter 6, is the summarizing of this paper and the prospect of isotope battery in the future.