The Modeling, Simulation And Analysis Of Cluster Tools Using Timed Color Petri Nets

Recently semiconductor manufacture is growing rapidly worldwide。However, complicated manufacture process leads to extremely high entry-barrier and manufacture cost。The manufacture process involves the participation of over hundred procedures and many key equipment, which includes so-called cluster tools。Cluster tools is the key equipment, and always bottle-neck equipment, during semiconductor manufacture。Prompt, intuitionistic and quantitive analysis has a significant importance in increasing manufacture efficiency and forecasting the manufacture cost。The key of getting a proper analysis is to build a proper model of cluster tools。The model must be reasonable and simple, can reflects physical procedure and status of cluster tools。The direction of wafer can be simulated to show up the time-relevant information for every step。All the simulation process can be showed...