Research On Signal Process Circuit Of Vacuum Microelectronic Accelerometer

With the development of modern science and technology, the accelerometer should be integration, micromation, high performance to meet the requirements of automobile, industrial automation, etc. Therefore the exploitation and study on new micro accelerometer based on new principles, structures and functions, has become a hot point in most developed countries. Vacuum microelectronic accelerometer is a novel accelerometer, which possesses extraordinary properties in high sensitivity, small volume, radiation-resistance, low voltage. So it can be applied in many areas, such as satellite, aviation, missile, automatic control, automobile and so on. Signal process circuit is a key factor which determines the performance of this kind of accelerometer. The main object of this paper is to design signal process circuit of vacuum microelectronic accelerometer.Signal process circuit of vacuum microelectronic accelerometer presented in this paper contains current detect close loop control circuit and data sampling and displaying circuit which is based on MCU(Micro Controller Unit). Current detect close loop control circuit contains I/V transform circuit, difference amplification circuit, secondly amplification circuit, low-pass filter circuit and feedback circuit; the data sampling and displaying circuit contains level shifter circuit, analog to digital conversion circuit, MCU data process circuit, LED(light-emitting diode) displaying circuit. This paper focused on the following aspects:1. Analyzing the principle of operation, structure and theory of vacuum microelectronic accelerometer.2. Designing signal process circuit of vacuum microelectronic accelerometer. Each circuit module is carefully analyzed and studied; and the main circuit module is simulated by circuit emulation software Pipsce10.0.3. Writing the corresponding program to realize signal displaying.4. Studying the interference which may arise in signal process circuit and taking some measurement to control it.5. Detecting vacuum microelectronic accelerometer with signal process circuit. The testing results indicate that signal process circuit meets the requirement of this type of accelerometer.