Research On Multiple-scale Piezoresistance Accelerometer Array

In recent years, for the demand of national defence, industry environmental protectionand automatic control projects,multiple-scale piezoresistance accelerometer array with theself-test function is studied in this paper. And there are two characteristics in this research.Firstly,multiple-scale piezoresistance accelerometer array is used as the detecting apparatusto increase the redundancy of the information. Consequently, multi-parameter measurement isrealized. It also improves the reliability, flexibility and currency of measurement and controlsystem. Secondly, the sensor with the self-test function can test whether it is in the normalstate before the sensor in function, which improves the reliability of the system. Therefore, inmany fields, this research has great effect on the development of the multi-parametermeasurement and multi-function control technology.The development of micro accelerometer and sensor array at home and abroad isintroduced in detail in this paper. Comparing performance and process maturity of all kinds ofsensors shows that the piezoresistive accelerometer is much better for this application. Theaccelerometer array has self-test function. Four scales 2×2 array is selected as the structure.According to the design constraint, the optimization design of structure parameter is got bytheoretical calculation and ANSYS simulation. Simultaneously, the location of piezoresistiveis given through ANSYS simulation, and final join in Wheatstone bridge. The dampingcoefficient of sensor system is calculated by analyzing air damp of beam and mass. Theself-test using electrostatic deflection and the shock-resistibility are analyzed both in theoryand in simulation. Also, the transverse sensitivity, mode of vibration, self-test function andshock-resistibility are simulated.According to the fabrication technology, an entire series of independent processes formicro multiple-scale piezoresistive accelerometer fabrication and the layout is designed. Theaccelerometer array is fabricated. At last, this accelerometer array is packaged well, and theinitial test is finished.