Hysteresis Compensation Fuzzy Control Method And Application For Piezoelectric Actuator

Piezoelectric actuated stage for ultra-precision micro-displacement of modern microelectronics manufacturing equipment as the core components, its R&D level directly affects the level of national electronic information industry and technological progress. However, the inherent hysteresis property of piezoelectric actuator will make a serious decline in system accuracy, and even cause the system closed-loop instability. Therefore, to further improve the motion precision of ultra-precise electromechanical systems, and meet the requirements of nano-processing and operations, it is urgent to study the hysteresis compensation control theory and method.This paper studies the piezoelectric actuator hysteresis compensation fuzzy control method, designs two-dimensional parallel micro-stage, uses a multi-input single-output fuzzy system to model the hysteresis of piezoelectric actuator, constructs the xPC Target real-time simulation system, and based on all these above, realizes the hysteresis compensation fuzzy equivalent control experiments.First, two parallel straight type of composite hinge body are adopted to design a low degree of coupled two-dimensional motion parallel micro-stage, then implement its structural optimization and finite element analysis, the use of EDWM is completed, to achieve the related testing and experiments.Second, an approach of modeling hysteresis based on MISO fuzzy system is presented with respect to the hysteresis of piezoelectric actuators. The proposed model can sufficiently solve the problem of multi-value hysteresis via an expanded input space. On the basis of concepts such as maximum membership, nearest neighbor and super radius, through training fuzzy system and parameter optimization with one order T-S fuzzy implication, the model of hysteresis can be precisely established using input and output data with the software Matlab7.9.Then, xPC Target system is used to construct real-time hardware-in -the-loop simulation test system. It can complete the piezoelectric actuator hysteresis compensation control system, rapid prototyping, hardware-in -the-loop testing and so on.Finally, use the fuzzy equivalent controller to perform compensation of hysteresis characteristics of piezoelectric actuators for micro-stage high-frequency sinusoidal trajectory and circular trajectory fast tracking control experiments. Experimental results show that the control method has a high tracking accuracy, simple and of good economic effect.