Design Of Micro-Displacement System Based On LVDT And SGS

Nano-position has a great influence on nanotechnology, nanoscience, nanofabrication, nanomanufacturing, nanometrology and many other subjects. Nano-positioning technology is the basics of the development of nano-measurement instrument, it's also the core and key technology for the development of nano-manufacturing equipment. The displacement of nano-positioning is in the nano, micro, meso, and macro(centimeter) range, and the positioning accuracy, resolution, and repeatability of the moving target are in the sub-nanometer or nanometer positioning accuracy. Nano-positioning technology includes driver, positioning mechanism, nano-sensors and nano-automation, among these, the nano-displacement sensor plays the most critical role, as the resolution of nano-positioning largely depends on it. Now, there are mainly three types of displacement sensors used for the direct driving for the integrated piezoelectric actuator, they are capacitive, inductive(LVDT, linear variable differential transformer) and the resistance strain. The work I have done are:(1) Designed three channel micro-displacement detection circuit based on LVDT. The TRANS-TEK's Series 230 LVDT sensors(has a displacement range of±130μm ) and the screw micrometer are used for the verification of the circuit. Experiments show that the circuit can be very precise for the detection of micro-displacement. In theory, the resolution of the sensor is Infinitesimal(determined by the subsequent AD conversion circuit), and the measured linearity is 0.01%.(2) Designed three channel micro-displacement detection circuit based on SGS. Bridge circuit is used for the verification of the circuit, Experiments show that the circuit can be very precise for the detection of micro-displacement. In theory, the resolution of the sensor is 30nm, and the linearity is 0.1%.(3) Designed a simple ARM emulator, experiments showed that the simulator plays a good job for the download of the program from the PC to the target board.(4) Designed a data collection, processing, display and drive target board which also integrated USB, Ethernet, and RS232 interface. Experiments show that the target board plays well for the collection, processing, and display of the six channels analog voltage which are in the range of 0-10V.