The Technology Study Of Plasma Cleaning Online

The on-line plasma cleaning use RF(radio frequency) to produce plasma under low-pressure, the particle of plasma has advantages of strong activity, low temperature and free path more longer. Compare atmospheric plasma cleaning it is more suitable deal with high precision surface treatment, using the online automatic mode, enhancing the efficiency, the industrial production caused many researchers'attention in recent years. Mastering online plasma equipment cleaning principle and device, analyzing the technics and process discharge, and studying the related aspects by experiment has important academic value and practical significance.This article is in the basis of reading extensive relevant information and the latest achievements, combining the practice experience, the paper expounds the plasma cleaning principle under low pressure of the on-line cleaning mechanism, and puts forward the medium gas matching principle, analyzing surface free energy and the contact Angle of cleanliness test method. Our project developed on-line plasma cleaning equipment, using the online plasma equipment to complete cleaning experiments, and testing the solid surface work of adhesion change by contact angle tester, the cleaning effect factor of gas flow rate, rf power, the processing time for of process are analysised. At last compared with ordinary plasma cleaning equipment DQX-206.