The Research Of The Optimal Design Of Sensor

With the development of semiconductor technology, micro-pressure sensor has been developed towards the direction of the semiconductor and integrated. This paper mainly discusses on the design of the relevant part of the micro-pressure sensor. As follows is the main contents.1. The part of the parameters of the micro-pressure sensor has been optimized. The pressure sensitivity of the silicon micro mechanical sensors is not only having relations with the thickness, the size of the silicon thin film and varistor resistance, but also the orientation, distribution and location of the resistor on the silicon thin film. The relationship between the output voltage sensitivity of the bridge circuit composed of varistor and the location and direction of the resistor have been discussed in this paper, the extremum and conditions of the pressure sensitivity of the sensor have also been obtained.2. The extremum of the longitudinal piezoresistive coefficient and transverse piezoresistive coefficients have been discussed in this paper. The relationship between the longitudinal piezoresistive coefficient and the direction of the resistance, the relationship between transverse piezoresistive coefficient and the direction of the resistance have been discussed, the extremums have been figured out.3. The parameters of the micro-pressure sensor is robustly designed by the tolerance design model. At (001) plane, The radius, thickness of the thin film, the angle between resistance 1 and<100> crystal orientation and the angle between resistance 1 and the thin film radial direction have been optimized taking the maximum response of micro-pressure sensor as the objective function. In the most optimal position obtained before, the radius and thickness of the thin film have been optimized taking the maximum response of micro-pressure sensor as the objective function. The two robust mathematical model are all solved using random probability algorithm with FORTRAN programming. This is the first time to introduce the idea of optimal design and robust design to the micro-pressure sensor. By the robust design, the mechanical micro-pressure sensor has a greater degree of improvement, and it is a significance for the further development of the micro-pressure sensor.