| The Fabry-Perot (F-P) cavity is widely used as a kind of spectroscopic device for its high-resolution and excellent frequency selectivity. It has been an important apparatus since it was invented and is used more and more widely with the improving of the technique. In the past few decades, F-P cavity not only accelerated the development of lasers, but also offered convenience to calculate, describe and control the wavelength adjustment for the tunable lasers. At the same time, with the rapid development of fiber and silicon processing technology, F-P cavity has been used widely in producing sensors to sense the changes of pressure, stress, displacement, temperature and acceleration. Now, F-P cavity is a key device in modern optical communication systems.In application, affected by such factors as structure, material and applied circumstance, etc, the F-P cavity is difficult to be attained its perfect ideal case for it is often deflected resonance frequency, nonnormally incidented and misaligned to yield nonparallelism. For F-P cavity is often used associated with Gaussian beam in spectrum analysis, sensing and optical communication, it is necessary to study the response of the F-P cavity to the Gaussian beam.In this paper, based on the multi-beam interference principle and the propagation equation of Gaussian beam in free space, it has been derived that the expression of the intensity of the transmitted beam for a Gaussian beam normally and nonnormally passing through a parallel F-P cavity. As a result, the characteristic of the transmitted beam and the influence of several factors on the intensity of the transmitted beam have been investigated. As a further work, this analysis method has been extended to investigate nonpallel Fabry-Perot (wedged F-P) cavity. The study shows that the transfer function used in wedged F-P cavity has some limitation, and the corrected numerical simulation results have been given out, Which will be applied for designing and using F-P cavity.
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