Automatic Generation Of Process Sequences Algorithm And Program

This paper concentrates on automatic process generation(APG). A process compilation program is developed to generate process flows from schematic representations of planar semiconductor device by two steps: sorting the structures and generating the processes.The one-way orientation of planar technology means some kinds of orders that exist between the units in the schematic structures of semiconductor devices. Using these orders and some other limitations derived from the practice of semiconductor technology, we can gain a unique sequence of structure units. The step of generating processes, which expands unit sequences to process flows, contains four tasks.(1) To design the process library. The process library includes two parts: process module and position module. The former is used to describe all the types of process mode that can be implemented currently and the latter, is of the ways of position.(2) To expand basic process flow. According to the structure units' qualities that are given in the input data, and according to the process library, we can obtain the process type and position way that is fit for each structure unit. Then, basic process flow is achieved by the insertion of process steps.(3) To optimize the basic process flow. Because all the process modes are described in use of the same format, and because the possibility of communion is not taken into account in the course of expansion, redundant process steps are inevitably included in the basic process flow, which can be predigested through optimization. The optimization is completed through adjustment due to position, combination of heat treatment steps and complementary process steps, and wipe-off of non-effective process steps.(4)To programe APG. In order to generate process flows automatically with the aid of computer, process steps library is designed to describe the attributes of all the individual steps, and a simple algorithm is developed to simulate the effects of individual steps on the wafer qualitatively. The process steps library is easy to extended, which ensures the extensibility of our APG.MyAPG is completed using Visual C++ language under Microsoft Visual Studio developing environment. The program has standard interfaces of windows application program, and can be used easily.