| A design method of high precision optical micro-displacement sensor based on birefringent interference theory of crystal is presented in this paper. The detailed analytical process of the measurement method is discussed and the theoretical model of the optical micro-displacement is provided. In the end, experimental results are shown. The measurement precision is 5μm, work distance is not less than 40mm. The experimental results show that coherent light is unnecessary, the dynamic characteristic is good and the structure is compact. It is insensitive to temperature, pressure and electromagnetic disturbance and there is no special requirement for the object. It is suitable for industrial online measurement and promising in the future application.
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