The Study Of The Micro Engine Machining Pressure Sensor

Sensor is an important tool to obtain information, and is one of three greatests technique of the information(include sensor and control technique,communication technique, calculator technique). Therefore, the sensor technique is thinked double importance as the top of technique in recent years by domestic and international, and input large quantity manpower,material resources for studing and developping it .The pressure of sensor is abroad applecated among a lot kind of sensor,be abroad used in the the process of control and automation technique in the petrochemical, the chemical engineering, electric power and national defense, and more have got the obvious up-trend in recent years.Make use of the capability of semiconductor material with pressure resistance and the better flexibility, to study and manufacture the solid pressure sensor of semiconductor with the integrated circuit craft and the micro engine processing technology,it has two major kind,silica pressure resistance and capacitance.The article research into the pressure sensor which is the silica pressure resistance with the micro engine processing technology. After short introdution about the mathematics model of the semiconductor pressure sensor, it was described that was the holistic design thought of the sensor which reserched into, from the format design, the separated retia slice, sensitive orgen of strucsure and the overall design thought for stucsure point of design. In the process which research into then sensor, it described about some keyses of the craft and proceeds. From the engineering the article described the environment whic the sensor needed,such as equipments, instrument etc., and providing list of resources capability for satisfying target, In addition, a few factors was returned the analysised with explain about affected finished product rate of the craft process.The sensor was test for craft,capability,proceeds etc,and comparison with analyze.Test result complete contented anticipant of various index sign.Finally,it analysised about the society and the economic of benefit.