Study On Array Silicon Pressure Acceleration Sensor

In this paper it is mainly researched on the sensors principle .structure design and process techniques . Non-linear self-emendation and temperature-bias self-compensate techniques of array silicon piezoresistive pressure, acceleration sensor is also reported.Based on silicon-piezoresistive method , the paper first gives the theory of array silicon piezoresistive pressure, acceleration sensor , and the design of its incorporated chip , microstructure and out-circuit. Several key techniques of making array silicon piezoresistive pressure, acceleration sensor such as 1C technic , MEMS (silicon-silicon direct bonding, anodic bonding, anisotropic etching) is also studied .minuteness engine machining, anode bonding etc.In the paper there are three ways which are examine-form, curve simulanting, to carry out sensors non-linear self-emendating; adopt the several curves approaching and curve simulating to achieve the aims of sensor error self compensation, fusion technology etc. Therefore, it providing referenced values of ways and directions for sensor system directing on .