Research On The On-line Measurement System For Subminiature Parts

The project researched in this paper is supported by the Science & Technology Research Foundation of Anhui Province: . The target is to design a micro-measurement system to measure the miniature parts and to get the measuring result with precision analysis.In this paper, the author firstly analyzes the general situation on micro-vision in domestic and overseas in Chapter 1 and 2. And the scheme how to measure the width of the circuit in semiconductor chips is also determined. The design of the hardware of this system is discussed in Chapter 3 and 4. Especially, what the author have done independently are: (1) programming with Visual Basic 6.0 for processing and measuring of the image (shown in Chapter 5); (2) finding out the factors affecting the measurement and analyzing the errors quantificationally (shown in Chapter 6); (3) doing experiment for the actual measurement and error analysis. It is shown that the system has a good stability, and the accuracy of the measurement is in about 0.2 m.The research will be of great importance in the manufacturing and inspection of miniature parts in the field of domestic mechanism, electronics and integrate circuits. It will also be of great practical sense when the technology is used into production and put into the market.