Research On Light-Electromechanical Control System For Digital Micromirror Device

The Digital Micromirror Devices (DMD) technology is an important development direction of the Micro Electro Mechanical Systems (MEMS). Based on the DMD and Digital Light Processing (DLP) principles, this paper analyzes the control mechanism of the Pulse Width Modulation (PWM) of the DMD with the specific electromechanical control method of the DMD, and establishes the PWM electromechanical control model of the DMD. It proposes a control scheme for Complex Programmable Logic Device (CPLD) and some key parts of the model are implemented on MAX+PLUSII software platform.In this paper, the paper also studies the bar buckling oriented DMD model, designs a basic structure for this model, defines the main parameter, and analyzes the principle of the DMD. The mechanics characteristic, especially to the bar buckling抯 large displacement and nonlinear distortion is deeply analyzed and calculated. Finally a numerical emulation is done for the board movement process of this DMD model, and a reasonable simulation result is obtained.This research work has a bright future and potential commercial value in many fields such as project devices, DHTV and fiber telecommunications.