Research Of Micro Electrostatic Vibration Generator Based On Micro-droplet Dielectric

The MEMS micro-generator which converts the mechanical vibration energy of environment into electrical energy is a research hotspot in recent years at home and abroad.In the support of National Natural Science Foundation, for the current spring or cantilever-based micro-vibration generator's problems, such as poor impact resistance ability, easy fatigue and so on, to carry out the key technology research of micro-droplet dielectric based micro-vibration generator, with important scientific and application value.The new structure of electrostatic vibration generator based on micro-droplet dielectric was proposed in the analysis of micro-vibration generator status and development trend. We analyses the working principle of this micro electrostatic vibration generator, established the theoretical model and have carried out some simulations; Developed the micro-droplet dielectric based micro electrostatic vibration generators'macro size prototype; To carry out the preliminary exploration of MEMS processing on this micro-electrostatic vibration generator.The main contents of this paper are:①We analyzed the micro-vibration Generator Status and Trends. The new structure of electrostatic vibration generator based on micro-droplet dielectric was proposed. Analyzed the working principle of this micro electrostatic vibration generator, established the theoretical model;②We carried out simulations of teflon electret electric field distribution in micro-cavity and the movement process of micro-droplet in micro-cavity. After all carried out the system-level simulation of electrostatic vibration generator based on micro-droplet dielectric;③We developed and tested the micro-droplet dielectric based micro electrostatic vibration generators'macro size prototype: when the acceleration is 2g, load is 1M?, the working frequency is 3Hz, the output voltage (peak-peak)is 1.21V, the output electricity is 0.73μW;④We carried out the preliminary exploration of MEMS processing on micro-droplet dielectric based micro electrostatic vibration generator, finished the layout design.