Research On The Piezoelectric Solid Micro Gyroscope

This paper presents a novel piezoelectric solid micro-gyroscope. Compared with the conventional gyroscopes or vibratory gyroscopes, the solid gyroscopes have high resistance to the shock. In this work, we give the detailed structure, reference vibration and its operation principle. We also conduct the simulation by the finite element method (FEM) and verify the feasibility of the operation principle.What's more, the device is optimized with the respects of sensitivity and biaxial angular velocities. Firstly, based on the operation principle of the device, the relationship between sensitivity and the reference vibration is discussed. By FEM, the optimal reference vibration is obtained, and when that is used, the device has high sensitivity. Secondly, we also present a novel reference vibration with new structure and special driving method, and thus the device could realize the biaxial angular velocity detection. In the meantime, the correspondingly reference vibration is optimized, and the optimal one is found.The fabrication process of the device is given, and the material of substrate, seed layer and reagent of chemical etch is researched. We improve the size of electrodes and their disposition. The driving and detecting circuit is designed and the PCB board is fabricated. By LABVIEW, the signals are acquired, including both the voltage amplitude and phase, with which the optimal reference is monitored. Finally the measurement results of the optimal reference vibrations for monaxial and biaxial gyroscopes are given, and they are compared with the simulation results. Measurements results are close to the simulation results, and thus the feasibility of optimal reference vibration is demonstrated.