Study On High-precision Laser Interferometer Displacement Measuring System Of Energy Balance

The"Energy Balance"method proposed by academician Zhang Zhonghua with Nation Institute of Metrology, has successfully realized the establishment of quantum mass standard based on precision electromagnetic measurement technology. In this thesis, a homodyne laser interferometer system is developed to achieve the precise positioning in coils'mutual inductance measurement setup.The system is based on integral layout and phase shift of polarized light method so that its stability and repeatability can be improved. The system's resolution is improved by optical path difference amplification technology. Based on the method of four quadrant detection and common mode repression principle, a four-orthogonal signal is differentiated to reduce the zero drift of optical intensity and environmental influence to the system.Under VC++, using high speed signal processing card and personal computer, a measurement program is developed to compensate and amend the interferometer displacement measuring results, as well as process interference. The high subdivision ratio and high speed real-time dynamic measurement are achieved, simultaneously with assurance on the overall precision of instrument.Difficulties such as the adjustments of optical measuring axis and the guiding slide's moving axis happened in experiments are analyzed. Therefore, a laser interferometer's optical path collimating system is designed such that the influence of cosine error is reduced in accordance with optical path adjustment.The system's precision is evaluated experimentally; the instrument's errors and design highlights are analyzed and the high precision nano-measurement experimental environment is discussed in the thesis.