| Electromechanical integrated electrostatic planet motor is a novel concept of general composite drive system with high integration of planet drive, electrostatic actuation and control. The drive is mainly composed of an eccentric rotor and an outer stator which consists of several electrodes insulated mutually. After voltage is applied to stators sequentially, a rotational electric field will induce revolution of the rotor along the inner of the stator, which will result in the rotation of the rotor based on the theory of the planet drive. Because of smooth operation, larger speed ratio, higher efficiency and easy control, the motor will find its broad application.The operation principle of this system is introduced. The expression of the output torque and the radial force is induced. The factor that influence the output of this micro motor is considered, including the length of the shaft,the choice of the insulated layer and the number of the electrode. The driving circuit is presented, which can produce the rotational electric field. The design parameters are given in detail.The free torque and bending vibration of the output shaft is theoretically analyzed, the expression of the free vibration frequency and the mode is obtained. The change of the frequency along with the parameters is analyzed. Based on the model superposition method, the change of the electric parameters will result in the forced vibration of the output shaft, which is analyzed in this dissertation. The basic law of the forced vibration is analyzed.At last, the simulation for the vibration of the shaft is carried out by use of the ANASY Classic and the ANSYS/Workbench software, the simulated value of frequency is obtained which demonstrates the correctness of the theoretic analyze. |