| Along with the development of micro electric-machine device and micro apparatus, the research of plasticity forming of microparts has been one of the most important research fields of MEMS,and micro machine is the key guarantee of plasticity forming of microparts.In this paper,a new microforming device is introduced,the microforming force comes from the electric magnetic force,not motor or piezoelectricity actuator.The principle of electric magnetic force forming is that uses a coil as driver,which is employed to generate electromagnetic pressure on the punch during a high-voltage electric discharge of capacitors(about 10-3～10-4 second).The micro forming is done by the punch with inertia force provided by electromagnetic force.This microforming device has four mainly advantages:1)the forming speed is very high.High velocity of forming can overcome the disadvantages of increasing friction force with the increasing surface and dimension effect of micropart;2)High quality of forming;3)the configuration of this microforming device is simple:4)the device can be controled easily and it is suitable for microforming mass production.It shows that the microforming device drive by electric magnetic force is very useful for microforming. |
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