Research On Design And Packaging Of The Micro Atomic Clock's Rb Vapour Cavity

The history of the development of atomic clock is over 60 years, in the period, people have more and more in-depth theoretical researches, and application fields are increasingly widespread. However, the high precision of the atomic clock depends a lot on environment. The maintenance of traditional atomic clock requires a complex and sophisticated system which is of great size and costs a lot. An important trend of development is seeking new theoretical support to simplify the structure of atomic clock and boost the field by miniaturization. The research work operated in this paper is based on this background and supported by national 863 Program.On the bases of in-depth research on the working principle and micro manufacturing process, the structure of Rubidium cavity and packaging technology are studied in great detail by means of theoretical calculation, finite element analysis and experiment performance. Initial development of equipment exclusive for rubidium packaging is also finished. This paper mainly contains the following four aspects:Firstly, the basic theory of atomic clock. In-depth discussion is carried out on structure of Rubidium atomic, especially on extra-fine energy levels. Theoretical instruction to design the rubidium cavity is provided by the conclusion of the discussion. Secondly, design of rubidium vapor chamber and manufacturing process. The working environment of Rubidium cavity is studied in-depth, including temperature, magnetic field and the buffer gas. Besides, the MEMS manufacturing process of the silicon cavity has been researched. Different processes are compared and analyzed.Thirdly, the Packaging Technology and process of Rubidium cavity. With anodic bonding, temperature, DC voltage, and bonding pressure in process of packaging are analyzed in a number of experiments. Finally, the new packaging technology is researched.Fourthly, exclusive equipment for Rubidium Packaging is researched. We analyzed the feature of rubidium packaging. modular design, anodic bonding workbench and the vacuum chamber are studied in great detail, and some samples are achieved.