Research On The Linear Motor With Piezoelectric Stack

Nanopositioning systems are fundamental elements in advanced manufacturing system as the Biotechnology, Life Science, Medical Technology and Nanotechnology. Piezo linear motors can provide extreme precision, high holding forces without an energy supply, and no magnetic fields, which make them the best choice for nanopositonssing systems.On the purpose of high precision, a new type of non-resonant linear motor was realized based on forced vibration of piezoelectric stack. In this thesis, experiments of piezoelectric stack, the construction of actuators, and the drivers of motor was discussed. The main research achievements and work were summarized as follows. The basic characteristic of piezoelectric stack was introduced. In order to get the dynamic characteristic of piezoelectric stack, experiments were carried out. The principles of the experiments were discussed. And the working frequency of the motor was determined at last.A new type of piezo linear motor based on two stators was investigated. The principle of motor was presented. The simulation and optimization of stator were done with the help of ANSYS software. Based on the experiment of the first motor, a new motor was made.According to the principle of motor and the characteristics of piezoelectric stack, the demands of the driver were proposed. The principle of existed driver of resonate motor was analyzed, and a new driver based on the integrated chip was developed. Finally, the mechanical properties of the motor were tested. The test system of linear motor, based on virtual instrument, was investigated.