Research On Micro-lens Substrate Thickness Measuring Circuit System Based On Optical Triangulation

Along with the development of science and technology, a lot of equipment is developing toward miniaturization, integration. The performance of them is more outstanding, so is the optical apparatus. People's research is no longer focus on traditional lens, prism, grating, but the emerging integrated optical system. Integrated optical system has a faster response speed, better reliability, and high cost performance.Micro-lens array is the basis of integrated optics components. As a minimal precision device, it integrates a lot of micro-lens into a larger lens substrate. The problem that directly faced is how to measure the substrate thickness quickly and effectively. A photoelectric measuring system will be designed here.First, the micro-lens is introduced in this thesis, including micro-lens background, definitions, application and methods of manufacture. Then a demonstration of the optical system is made based on optical triangulation, indicates that the measurement accuracy of system can completely satisfy mission requirements. The measure circuit system is also introduced in this thesis, so that we have overall knowledge of the system.In the second part of this thesis, the measuring circuit is particularly described. First the principle and the drive mode of the CCD is introduced, then how to complete the CCD drive using Verilog HDL is described, and a test validation about driving pulse was performed later. It also details the USB protocol, and completes the circuit design about USB transmission, thus enabling rapid transmission of data. At the same time, DSP is used as the control chip, its peripheral circuit is also designed, so the whole work of the entire circuit can be coordinated. And how the DSP works is also detailed in this thesis.In this thesis, a separate chapter was made to detail the PC software program on the basis of programming methods comparison, including the implement of various parts of the software and why choose Borland C++ Builder platform. The software can monitor the USB, read data from the USB, do data processing and graphics drawing.Finally, the whole system that designed is tested and desired purpose is achieved. The test result is attached in the end of this thesis.