| Owing to its excellent electrical property,YBa2Cu3O7-δ(YBCO)films has been applied in the electron devices.It makes the devices with super higher sensitivity,lower power loss,and better anti-interfering.Fine pattern techniques of high temperature superconducting films were accelerated due to their wide applications in SQUID,Microwave,Antenna,and so on.The emphasis of this dissertation is to apply chemical modified Sol-Gel process to the field of high temperature superconductor for developing the fine-patterning of YBCO superconducting films.Combining the fabrication of YBCO films pattern and construction of superconducting I-V curve testing equipment,The critical current density(Jc)value could be measured.The study has great significance on the fabrication and property test of superconductor electronic devices.In this paper,stable YBCO/AA sol was synthesized using yttrium,barium and cuprum acetates as raw material after they were dissolved in methanol using methacrylic acid as modifier.By adding BzAcH to YBCO/AA sol,The YBCO/AA/BzAcH sol was obtained. YBCO/AA and YBCO/AA/BzAcH gel films on silicon,quartz and LaAlO3 substrates were fabricated by dip-coating.The UV and IR spectra indicated that the gel films show the UV photosensitivity,and their absorption peaks were 245nm and 325nm respectively.Utilizing this photosensitivity,the two gel films were fine patterned by exposure to UV-light though mask.The results showed that the minimum line width can reach 10μm with the exposure time for patterning being 40min using YBCO/AA gel films,but which can reach 2μm with the exposure time for patterning being 20min and the smallest line width is 10μm when we applied YBCO/AA/BzAcH gel films.According to Surface Profile Measuring Instrument,XRD,SEM and Superconducting critical temperature(Tc)Measurement System analysis,the properties of heat-treated films patterns fabricated by YBCO/AA and YBCO/AA/BzAcH gel films both had better c-axis orientation,and the Tc values are 92 K and 91.6 K,with△T values being 0.7 K and 0.9 K,moreover,the patterns consisted with negative of mask,having clear,uniformly and regular figures.Based on four down-lead method and Superconducting Tc Measurement System,through assembling instruments,adjusting connection,loading software,designed the equipment for testing superconductor I-V curve.With fine patterning process,the films samples like mark "I" were fabricated.The I-V curve of sample was measured,then calculated out the Jc value.The I-V curve of superconductor films patterns fabricated by YBCO/AA sol and YBCO/AA/BzAcH sol were tested,educing the Jc values being 0.43×105 A/cm2 and 0.6×105 A/cm2 respectively.
|
PDF Full Text Request