The Synchronous Control System Of Stroboscopic Imaging And Motion Excitation

Microstructure motion testing technique is an important part of MEMS testingtechnology. Becauseits motioncharacteristicisnotonlyusedtoevaluateperformanceof MEMS device, but also can be used to analyze material and mechanicalcharacteristic of the microstructures and parameters having business with reliabilityand stability of MEMS.Stroboscopic photography has been widely used because ofhigher motionfrequencyofmicrostructures inMEMS device. In ordertomeet testingrequirements of MEMS periodic motion, basd on Field Programmable Gate Array(FPGA)platform,a synchronouscontrolsystemofstroboscopicimagingandmotionexcitation isdesigned.Keypointsareclassifiedasfollowing:1. Techniques of stroboscoic imaging and its application in periodic motiontesting of microstructures are fully investigated and analyzed. Controlling timesequencing of stroboscopic lighting, motion excitation, image acquisition and severaltechnical norms, such as wave, freqency, amplitude, offset etc were determined. Anoverall design plan of a synchronous control system of stroboscopic imaging andmotion excitation, which is based on FPGA platform, is put forward. Direct Digitalfrequency Synthesis (DDS) and the feasibility of its application in motion excitationsignal designarefullyanalyzed.2. The circuit design of a synchronous control system of stroboscopic imagingand motion excitation, which is based on FPGA platform, and unit testing arecompleted. The circuit can communicate with the PC by serial port. After getting thecorresponding parameters, the circuit can output three-waymotion actuatingsignal ofthe microstructures, one-way pulse actuating signal of stroboscopic lighting andtwo-waytriggersignalofdigitalCCDimageacquisition.3. System software design of FPGA platform with modular programming andprogram design of PC serial communication which is based on VC are completedsuccessfully.4. Synchronous control circuit of based on the stroboscopic imaging and motionexcitation output pulse excitation signal of stroboscopic lighting. Circuit design of asemiconductor laser (LD) driver is completed, which constitutes a stroboscopicillumination. 5. Synchronous performance testing of the stroboscopic illumination and motionexcitation signal of the microstructures and delay conpensation are completedsuccessfully.