| Along with the development of the modern physics, micro-electronics, computer and inertial technology, the micro-mechanical micro-gyroscope with its unique characteristics has become a development trend for inertial sensor and it possesses a good application prospect .But the sensitivity and miniaturization of micro-gyroscope is limited by traditional detection mode some extent, thus new materials and new mechanism applied in the micro-gyroscope are urgently needed. Meso-piezoresistance effect meets the requirements of the development of micro-gyroscope.It is explored a novel NEMS—micro-gyroscope GaAs–based micro-gyroscope, the sensitivity of micro-gyroscope based on the GaAs/AlAs resonant tunneling film'meso-piezoresistance effect will higher than traditional detection mode'micro-gyroscope. In the paper Ansys finite element software is used to simulate and to analysis the structure of the micro-gyroscope, some related dynamics data are also got. Then on the base of the meso-piezoresistance effect, the sensitivity of micro-gyroscope is calculated, certain important factors which can effect the micro-gyroscope'performance are discussed too. Main research the contents are as follows:1 After advantages and disadvantages of the four traditional detection mode are discussed, it is hoped that the higher sensitivity and lower temperature effect will realize if micro-gyroscope uses meso-piezoresistance effect as detection mechanism.2,According to the vibration theory, the Ansys finite element software is used to solve the driving vibration and the detection vibration of the micro-gyroscope, and the result that when the micro-gyroscope is working angular velocity rotating on the z-axis is proportional to the strain on the micro-beam is gained .3,The quantum mechanics and the meso-piezoresistance theory are used to simulate the micro-gyroscope ,and the values of bias voltage on the resonant tunneling film and the sensitivity of the micro-gyroscope are obtained...
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