The Heat Transfer Emulation And Experiment Of RTP System

The Rapid Thermal Processing is an advanced craft of the semi-conductor manufacturing industry.Its main function is carry on oxidation,anneal,the formation of metallic silicon,rapid thermal chemical vapor deposition,etc.And it also has advantages such as high ascending and descending velocity of temperature,single-wafer processing,procedure control,and different crafts with different control systems in the same equipment.As the circulate platform and the specialized environment of RTP craft,the RTP equipment still stays at development and innovation phase,in working principle,system structure and related theories.Only one homemade RTP equipment with independent intellectual property rights is RHT series developed by CEC&Huatsing Microelectronics Engineering Center.For developing an 8-10 inch RTP device with radiation heating and revolving salver in one kettle,the following basic research is undertaken by this dissertation.First:Based on the craft requirements,the temperature curve of wafer spike anneal is put forward.Second:To some representative states,including heating,cooling and temperature measurement,the theory analysis is done.The illation of main design parameter is given out and taken into the device developed.Third:Put forward the real time and non-contact wafer temperature measure by fiber transfers,and the mechanical structure of detection end.The general waveband detection with original creation is made and pass the experiment,which establish the technology elements for the foundation of temperature measure system.Based on this the rough structure is put forward.Fourth:Put up the numerical emulation analyse in heating and cooling systems,mainly for the model of relation between capability and structure parameters.