Design And Fabrication Of Novel Polymer-based Microring Resonators

The transmission characteristics of microring resonator are analyzed by optical waveguide and coupled-mode theory. It shows that the transmission spectrum of microring resonator depends much more on two important factors, i.e. the coupling efficient, and round trip loss, several structures of the microring resonator are also introduced, and these offer a theoretical basis for design of microring resonator.The film preparation of polymer PSQ-Ls(liquid state) is investigated;The influence of the ratio of solicitation solvernt on film quality is analyzed, a good waveguide film is obtained and the optical properties are measured. The curing process of PSQ-Ls is investigated emphatically, by optimizing the curing condition. The PSQ-Ls could have a low optical loss; The method of tuning the refractive index is also investigated;And it shows that the PSQ-Ls is a promising photonic polymer material.In this paper the polymer microring resonator based on PSQ-Ls material is designed. The design includes different kinds of buried mircoring resonator and some testing structures. By optimizing the waveguide width, the radius of the ring, the gap and the coupling length, the microring resonator with the smallest insertion loss and the largest extinction ratio could be obtained. The idea behind design and layout of the designed mask are given, and the mask has been fabricated.The central wavelength of microring resonators based on SOI and all polymer configuration versus temperature is analyzed. Using the large themal optical coefficiency of PSQ-Ls, athermal microring resonators based on SOI and all polymer configuration are analyzed and design. It is shown that resonant peaks shift with temperature is seldom found for SOI microring resonators with PSQ-Ls over-cladding and all polymer microring resonators with a big coefficient of thermal expansion substrate .Conventional photolithogoraphy,nanoimprint and template filling methods used to fabricate waveguides are introduced. In the paper nanoimprint and template filling fixed with photolithogoraphy are used , meanwhile the procedure of fabrication for polymer waveguide microring resonators is explored elementarily. Finally a systerm used to measure the microring resonators is established with lensed fibers.