Research On The Output Characteristic Of Piezoelectric Micro-displacement Actuator

As one of key technologies of the front science and technology -nanotechnology, precision orientation technology has became the common foundation in many modern industry domains and the front science and technology research. The piezoelectric micro-displacement actuator has been used in the precision orientation technology widely because of its outstanding advantage. Whereas, the inherent hysteresis and creep characteristic of the actuator have brought the difficulty for the micro-positioning system control. Therefore, it appears especially important that how builds the piezoelectric micro-displacement actuator nonlinear model and carries on the precise control to improve the micro-positioning system control precision.In this article, on the basis of analyzing the present domestic and foreign research on the piezoelectric micro-displacement actuator, we have elaborated the actuation principle of the piezoelectric micro-displacement actuator, and have given the further explanation from the microcosmic angle. The characteristic of the actuator has been analyzed, simultaneously we have also designed the load installment to carry on the demarcation experiment with the output characteristic of piezoelectric micro-displacement actuator under the different load. In view of the behavior of hysteresis of the actuator, we deal with the data of the experimentation with the help of the orthogonal experimentation; and by means of the regression analysis method and the BP artificial neural network, the mathematical models of the actuator displacement output based on the load are established. Then the models received are validated.The simulation results show that the models built simulate the behavior of hysteresis of the actuator preferably. It is the beneficial attempt to improve the control precision of the micro-positioning system.