Dynamical Analysis Of Digital Micro-mirror Devices

The MEMS is the development and application of science and technology in theresearch field of micro world. The MEMS products have promising prospect andpotenal commercial value. These products have more and more important roles in thecommercial competence. The DMD is the application of MEMS theories. It is also theresult of marketing and commercializing of science and technology.In this paper, the principal theories of DMD and DLP are interpreted, and thedetail structure of DMD element is determined. Main requirements and designs of thewhole chip are explained.On the basis of the Lagrange-Maxwell equtation, the electromechanical dynamicsmodel including electrostic force and contact force of the DMD is established. And onthe basis of the structure and size of TI ,the structure and parameters of DMDelement are determined.The electrostaic force of the DMD sloped pole plate is obtained with the integral.The contact force is derived by the micro continuous medium principle.The role ofcontronl volt sequence and the various motion statues are discussed and illuminated.And electrostatic force and contact force are simulated.By comparison, the effect ,whichthe contact force has effect on the DMD cannot be neglected ,is obtained. And thecontact force plays an important role in restraining from the impact.The DMD parameters are determined with the relevant theory of MaterialMechanics and theory Mechanics and Mechanical Vibration. On the basis of theseparameters,the whole motion differential equation is solved and the curves ofmicro-mirror are obtained,and the analytical results coincide with the results measuredin pracce very well. These are showed the mechanical dynamics model of DMDestablished ,the structure ascertained,the electrostatic force calculated,the contact forcecalculated and the differential equation solved are feasible and right in theory.The impact and the impact torque are discussed. The electromechanical dynamicsmodel when DMD beared impact is established. the differential equation is analysedand the curves are obtained. By compared the simulating results with the results themicro-mirror are not impacted.the effect,the impact almost has no effect on the DMD,isobtained,which showed the DMD is very well in anti-impact. Motion curives are simiulatedby the various damp coefficients. the effect that the turning damp and impact damphave no obvious effect on the DMD is obtained.