Dynamic Characteristic Testing For MEMS Micro-Device With Base Excitation

Studying on dynamic characteristic of MEMS micro-device depends on relevant testing system. Micro-device can be excited by high frequency base excitation equipment with piezoelectric ceramic, so frequency sweep testing and the impact testing for micro-device can be achieved, and resonant frequency and impulse responding characteristic of micro-device can be obtained. Dynamic characteristics of piezoelectric ceramic and base excitation device with piezoelectric ceramic are decided to a large extent by performance of the power source. The power source with large bandwidth, large current and high-power was developed. The power source can charge piezoelectric ceramic in high speed and thus the response of the piezoelectric ceramic can be increased. Another power source of impact testing, which can provide the highest output voltage 165V, was also developed. Large transient current can be provided by this power. Testing of piezoelectric ceramic dynamic characteristic was achieved with the power sources. Resonant frequencies of piezoelectric ceramic were obtained. Dynamic characteristic testing equipment for MEMS micro-device based on base excitation with piezoelectric ceramic was designed. Impact testing of micro cantilever beam was carried out. By analyzing the testing results, the resonant frequency and impact response of the micro cantilever beam, were obtained. Dynamic characteristic testing methods for MEMS micro-device based on base excitation with piezoelectric ceramic are summarized. Resonant frequency test experiments under high load for micro beam structure were preceded by using the dynamic testing system which we developed. The experiments results show that the dynamic characteristic testing for typical micro-device under high load was successfully accomplished. It is also shown that the resonant frequency of the micro-device gets higher as the acceleration of environment increases. Simulation with finite element analysis method was carried out for design before impact experiments, and the theory analysis results are in good agreement with the experiments results, and the error was analyzed. So, it is proved that the theory analysis method is correct and feasible.