| According to the structure of micro bio-chemical analyzer, a new type of mini temperature-controlling system was designed, whose key component was a micro-heater chip made of silicon.On the basis of system demands, the hardware and control method of temperature system were presented. The distribution of metal stripe was analyzed and calculated, and the thermal analysis was carried on using PATRAN software. Finally the structure parameters of the chip were determined.Two different micro-heaters were fabricated by MEMS technology. Experimental results showed that the two chips have the advantage of even temperature, fast response and long life span.Based on the experiment, the mathematical model of close-loop temperature-controlling system and PID controller were constructed. MATLAB software was used to simulate the control system, and the optimum parameters were obtained.The temperature-controlling system has an adjusting time of 60s and the control precision is±0.28℃. The results showed that the system can meet the requirements of the bio-chemical analyzer and also promotes the development of the bio-chemical to miniaturization. |
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