Simulation And Experimental Confirmation Of The Growth Characteristics Of ABO₃ Perovskite Thin Film

In this thesis, both simulation and mathematic deduction are employed to make further research in the growth mechanism of ABO₃ type oxide thin film and the rules obtained are used to apply to experiment. The work in the thesis include:â‘ As for molecular source, the initial growth process of SrTiO₃ thin film is simulated. Due to the limit of calculating ability, the source is simplified to only a mixture of SrTiO₃, SrO, TiO2 and the initial growth process is simulated under different deposition rate and different substrate temperature.â‘¡Based on the fact that the growth of ABO₃ type multi-component oxide is achieved by the immigration of cell, Kinetic Monte Carlo method is developed, with the consideration of initial kinetic energy of cell, to obtain 3D model and algorithm of simulating homoepitaxial growth of SrTiO₃ thin film. With that model, the detailed evolution of morphology, growth mode, surface roughness and initial island of 3D morphology of ABO₃ type thin film(take SrTiO₃ as example), are investigated under different substrate temperature, different deposition rate as well as different initial kinetic energy of cell. The relationship of growth mode-initial island-surface roughness, is discussed.â‘¢The influence of kinetic energy on crystallized temperature is deduced and confirmed experimentally by fabricating BaTiO₃ thin film on Si(001) substrate with RF sputtering. The experimental process is also used with Pt/Ti/SiO2/Si substrate. The crystal structure, composition and surface roughness and electronic property is analyzed and characterized.The main conclusions with innovative significance acquired from the present...