Development Of Nano Coordinate Measuring Machine Main Body And Research On Driving System Of Z-Axis

Many types of three dimensional mechanism (3D-mechanism) are used in modern industry. Specially, in precision manufacture technology, coordinate measuring machines (CMMs) play the key role. With the improvement of measurement accuracy, especially appearance of the nanometer-level accuracy, conventional coordinate measuring machine can't meet the demand of 3D measurements, so Nano-CMM appears in the world. In order to improve the measurement precision of Nano-CMM, much technology should be used, for example, precision of structure, driving technology, probe technology and so on.This paper presents a novel structure design of Nano-CMM main body. The new structure named symmetrical-bridge is developed based on the analysis of conventional Nano-CMMs. The static analysis and dynamic analysis of the new structure will be introduced in this paper, and the aim is to assess and analyze static & dynamic accuracy of structure. Compared with rectangular-bridge and arch-bridge, this new structure provides great static rigidity and dynamic rigidity based on theory analysis and ANSYS software analysis. Therefore, the superiority of this new structure is verified and the optimum design is finished.The research on driving system of Z-axis will be introduced in this paper. Though analysis the driving system will be developed, included selecting of driving mode, driving motor, data acquisition card and so on. The D/A and I/O of data acquisition card will be controlled through VB software, so programmed real-time control of Z-axis should be achieved efficiently.