Research On Driving Technology In High-precision Micro-motion Worktable Of 6-DOF

The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning. Among the worktables driven by the modes at present, the ones driven by the traditional mechanical mode possess large measuring range but low accuracy and driven by the piezoelectric ceramics driver possess high accuracy but small measuring range. The two modes both belong to contact mode. The paper study a new driving mode in worktable of single-level structure of 6-DOF which possess measuring range of millimeters and accuracy of submicrometer.The research is based on the project sponsored by the National Natural Science Foundation of China(NSFC). To be summarized, the main contents and the research results of the paper are as below:1. Studied the feasibility of the modes of electromagnetic attraction and repulsion. Designed the testing devices driven by the mode of electromagnetic attraction and repulsion.2. Developed the control system of the devices by the mode of electromagnetic repulsion. Finished the design, PCB and debugging of the hardware and the software programming.3. Studied the control algorithms in the mode of electromagnetic repulsion. Developed the anti-hysteresis method in voltage control and achieved good effect by using the method.4. Designed the micro-motion worktable of 6-DOF by electromagnetic driver on the base of the research of experiments.