The Research Of Zygo Interferometer And It's Application

Interferometric measuring technique is a measurement technique basing on theoptic interference principle. Modern interferometric technique utilizes the laser aslamp-house and the advanced production of optics and electronics. The moderninterferometric technique is good at measure word, resolving power, anti-jammingpower and precision. On the other hand, with the rapid development of science andtechnology, other measure methods cannot satisfy the higher measurement need ofmodern industry, so it is used in much field.Nowadays there are several famous corporations in production and research ofinterferometer, Zygo Corporation in America is one of them. Zygo digital waveforminterferometer in our laboratory is bought from it at 1985, and a sort of Fizeauinterferometer. It can be used in quick measurement of the real time interferograms ofvarious shape and complexity extent and the interferometric graphics, The pivotalcomponents of it include MARK III interferometer, the processor of interferogramsand control terminal, with many accessories. Because of being short of software andgetting behind in the performance and function of the image collection system, itcannot satisfy the present measurement need. The main propose of the paper is todesign an image collection system and an image processing software regarding theinterferograms as object, and set up a modern interferometric system to satisfymodern measure requirement. The work finished in the paper is shown below:1) Regarding the interferograms as object, an image collection system with highperformance is designed with the core of CMOS image collection chip, and includeshardware and control software.2) Basing on the interference principle, a new method of interferogramprocessing is contrived.3) According to characteristic of the interferograms, an interferometric imageprocessing software is designed to read and process images, and output data on theinteractive way.3) To expand usage of the interferometer, the research of measuring the surfacetemperature of the cylinders based on interference principle is finished with theinterferometric system.the creative work in this paper is:1) An image collection system basing on EPP port is designed, and used ininterferometric system2) As a new method of interferogram processing, curve fitting arithmetic alongthe normal of fringe edge is contrived...