Study On The Effect Of Magnetron Parameters On Deposition Rates, Microstructure And Properties In Cr-Containing Graphite-Like Carbon Coatings

. Study on the effect of two primary sputtering parameters on deposition rates in Cr-containing graphite-like carbon coating by changed the sputtering current of Cr target and substrate bias. Study on the effect of Cr target current on knoop hardness, scratch adhesion, tribology properties of Cr-containing graphite-like carbon coatings. The c-c bond structure of coatings is characterized by Raman spectroscopy and Four probe electric receptivity measurement method (FPM). Study on the effect of Cr target current on microstructure of Cr-containing graphite-like carbon coatings. The variety of surface morphology of the coatings in different Cr target current was observed.Some significant results are obtained as follows: The C-C bond structure of Cr-containing graphite-like carbon coatings is mainly sp2. Test indicated the amorphous character of the coatings in different Cr target current. The change of Cr content is not bring the change of crystal structure. Deposition rates increases with the sputtering current on Cr, deposition rates of Cr-containing graphite-like carbon coatings increase with the absolute value of substrate bias when the absolute value of substrate under 60 V, the deposition rates decrease with the absolute value of substrate bias when the absolute value of the substrate higher than 60 V. the change of Cr target current have a great effect on hardness, friction coefficient and wear resistance. The hardness of Cr-containing graphite-like carbon coatings decrease with the increase of the Cr target current. It can improve the adhesion decrease the friction coefficient when the increment of Cr target current is little. The mechanical properties such as: hardness, adhesion, wear resistance will become badly when the sputtering current of Cr is too higher.