Design And Investigation Of Capacitive Coupling Radio Frequency Glow Discharge Source

Among so many kinds of analytical instruments, glow discharge optical emission spectrometry (GD-OES) has been an important technique for its abilities to analyze solid samples directly and unique potential for depth profile analysis. Radio frequency GD-OES is attracting more interests because radio frequency (RF) glow discharge can be applied not only to samples that are electrically conductive, but also to those that are electrically non-conductive. And the developments of RF-GD-OES are focused on the design of glow discharge source.In this article, three kinds of radio frequency glow discharge source (Marcus-type and two kinds of Grimm-type sources) are assembled and their structures are presented. The sputtering of electrically conductive and non-conductive samples is achieved.Presents the difficulty of designing Marcus-type source applied on electrically conductive samples by the experiments of building the calibration curve. The effects of gas pressure and RF power on sputtering rates of Marcus-type source is investigated when glass samples are sputtered.The structure of Grimmâ… -type source is compared with the other one. The importance of structure designs of source is indicated through many experiments. The effects of the thickness on intensity are investigated. The best operation parameter for glass samples (70W, 450Pa) is decided based on the experiments on Grimm-â…¡ source. A piece of advice for choosing characteristic wavelengths is brought forward.The investigation is a boost to the applications of GD-OES in our country, proofs the ability of RF-GD-OES for analyzing electrically non-conductive samples directly and is a meaningful research for developing glow discharge source and promoting its analytical capability.