Research Of Flexible Thin Film Amorphous Silicon Solar Cells

Recently, with the development of space technology, lightweight substrate thin film solar cells have been researched widely. In these solar cells, flexible thin film amorphous silicon solar cells are attached importance for their advantages in many aspects. Polyimide film has been the ideal flexible substrate for its physical and chemical performance. But, the flexible brings some new challenges to the manufacture of the solar cells.Flexible substrate has a poor heat resistance, so the deposition temperature should not be too high, commonly below 200℃. At the low temperature, we obtain the P-type a-SiC:H materials with high bandgap, thought adjusting the other deposition conditions. P-type a-SiC:H has been used in the solar cells instead of a-Si:H, which improve the shortwave response and raise the short-circuit current of the cells.Inversed-structure are adopted for the low transparence of the flexible substrate. The I/P buffer is important for solar cells. We obtain some kinds of I/P buffers with different character through changing the order of gases into the chamber, and find the correct method to improve the performance of the solar cells. Also we find the H₂ plasma can raise the open-circuit voltage of the cells.The solar cells would been destroyed in the deposition process for the high thermal expansibility of the polyimide film. So It's difficult to deposit solar cells on the large-area polyimide substrate. Nickel film deposit on the aluminum film to prevent aluminum diffusion instead of ZnO film, which improve the stability of solar cells. And solar cells can be manufactured on the large-area flexible substrate. Solving the problems, we improve the performance of the solar cells. In this paper, we obtained the thin film amorphous silicon solar cells with 200W/Kg on the large-area flexible polyimide films by PECVD.