Research On The Testing Method Of Mechanical Properties Of Mems Materials

Micro-electromechanical systems (MEMS) are micron-scale sensing and/or actuation devices integrated on a chip. With the development of Microelectronic Mechanical System, it is found wide application in industries and national defense. The reliability of MEMS components is required higher and higher under thermal, electric and magnetic forces. Since MEMS components have mechanical moving parts or are under mechanical force, the high mechanical behavior for MEMS material is required.The technique that used to measure the mechanical properties for MEMS is different from the traditional one considering the size scale. A uniaxial tension test system for test the mechanical property of MEMS materials is presented in this thesis. The strain is measured by Interference strain /Displacement Gauge (ISDG).The specimen used in the uniaxial tension test is very small. The thickness is only 200um, and the width of the test part is 300u.m. It is first time nationally to use such a small specimen to measure mechanical properties of materials with uniaxial tension test.The contents of this study are as follows:1. The techniques of mechanical property test that have been used for MEMS are summarized. The method and process of the uniaxial tension test methods are described in details.2. The specimens with grips are optimum designed. The stress distribution in the specimen is obtained by the finite element analysis (FEA). The specimen and grips geometry parameters are adjusted to get a good stress distribution.3. The processing of specimen machining and surface treatment is studied. And a set of process for specimen preparation is set up.4. The principle of the experiment including the ISDG method is introduced. And the effect of shape and distance of the indention on strain measurement is analyzed.5. The multicrystal copper samples are tested, and the stress- strain curves are obtained.