Study On The Integrated Optomechanical Analysis Optical Surface Post-Process System

Advanced design tools are applied in high-precision and large-size optomechanical system design, Such as optical CAD software (Code V, Zemax etc.) and mechanical CAD software (Nastran, Ansys, Ideas etc.) are applied in optical design and mechanical design respectively. There is not any Integrated Optomechanical Analysis tools.Integrated Optomechanical Analysis integrates the disciplines of mechanical analysis, thermal analysis and optical analysis etc. The content of its research is that distortion will be generated under the mechanical or thermal load. The distortion includes rigid-body and aberration. The existed tools can't devide rigid-body and aberration. Integrated Optomechanical Analysis devides rigid-body and aberration, then computes the pv and rms. It provides guidance for design, tolerances allocation and alignment of optomechanical system. Finally, abberations are converted to a sort of data form that can be imported by corresponding optical design software to observe their impact upon the optomechanical system imaging performance.Several key technologies for integrated optomechanical simulation are introduced. Gram-Schmidt method for Zernike polynomials fit and singular value decomposition(SVD) are concerned. The direction question for Zernike polynomials fit is discussed and the surface error in the normal direction is deduced. To solve-the coupling and mixture of Zernike polynomials fit method, rigid-body displacement is removed with coordinate transformation and then fitted with Zernike polynomials. Programs are developed with Matlab language under Windows operating system. Precision analysis is carried out for this method.