| At present,information technology is rapidly developing to high integrated and complex direction, more and more microchip components have been integrated on one substrate. In order to minish the volume and weight of the system, one-way is to develop the micro-integrated technology, and another one depends on miniaturizing the components. The inductor, which is one of the most important magnetic components, is not only used in LC filter and choke but also in RF communication circuit. The thin film inductor can be integrated with semiconductor components, so far it has not been widely used in these fields, the reason is the limited of thin-film material and substrate, process technology and design technology.Designing and fabricating thinï¼film inductor is the key point of this paper. We adopt the method that mode of calculating by theories and make inductors by experiments. Firstly, based on the Biot-Savat theory, we set up the computational model of the inductors, for different shape, and then use this theory to design our thin-film inductors with multi-value. Secondly, we have studied the properties of the CoNbZr high frequency soft-magnetic thin film, and use the DC magnetron sputtering system by conquering the key technology to fabricate double-sides thin-film inductors on 10mm*10mm Printed Circuit Board and 20mm*20mm ceramic board. Finally, we have tested the properties of the inductors, and discuss the influence of frequency,quality factor and inductor value on the thickness of the film and the form of the inductors. According to the value of the testing, we can draw the conclusion that the value of the inductor get from the computation is corresponding with the testing value, and our inductors can be used in high frequency from 1MHz to 200MHz. The new method of fabricate thin film inductor would bring the inductor from three-dimension to two-dimension, minish its volume and weight and content with the requirement of "small,light and thin" for the apparatus.
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