Study On Basic Theory And Key Techniques Of Micro Vibration Power Generator

Micro power is one of key area in the development of MEMS technology. With the quick development and maturity of MEMS technology, micro power has become the key problem in this field. It is an important element in realizing the autonomous working of MEMS sensors, actuators and Microsystems. Different kinds of micro powers have been developed, however, to develop a micro generator system or micro energy conversion device, which can be used without the limitation of time, has long being a important research program.In this paper, the recent development of the micro power is illustrated. The principles of these micro powers are analyzed. In many circumstances, these micro powers cannot be recharged or replaced. To solve the problem, we propose a novel miniature vibration generator, which consists of a micro threadlike spring, a magnet and an inductance coil. It will meet the requirement of many vibration circumstances, such as automation control, embedded medical device, wireless net sensor system and micro robot. It is an important research in the attempt to realize the integration of micro power, micro sensor, micro actuator, and low power consumption circuit. We can foresee its scientific importance and its possible applications. The research work is presented as following. ① Based on analyzing existing documents, the current development in the area of micro power is analyzed, especially those vibration ones.② The relevant theories of micro electromagnetic vibration power generator are studied. Finite element analysis is employed to optimize the design of the vibration pickup system. Theoretical computation and analysis is carried out to find the relationship between the resistance and induction of the coil and its size. We also analyzed the interaction among the distribution of the magnetic field around the magnet, the induced electromotive force in the coil and the vibration of the magnet. ③ The techniques are developed to fabricate such vibration generator. A prototype is fabricated. Its main parameters are given as following, resistance 514.7Ω, and typical working frequency 122Hz. The output voltage is about 134.3mV and the output power is about 18.04μW, when load resistance is 1000Ω.④We also designed the experiment system and the method to test the micro generator. The result is analyzed and discussed.