In this paper I deposited the NiZn ferrite films in different technological condition by the PLD technique, and studied the microstructural and magnetic properties of films, andgiven the conditions that high quality films were deposited. The SEM, XRD and VSMrevealed that the main crystalline phase of films is spinel structure. With increasing of substrate temperature, crystalline grain size increases. The films on Si substrate were [400] orientation; the deposited rate of films increased with increasing of substrate temperature, and descends when substrate temperature was at higher temperature, the change of the films deposited rate on glass substrate is more sensitive with change of substrate temperature, the deposited rate of films on silicon substrate decreased under higher oxygen pressure. It is conclude higher substrate temperature and sufficient oxidation reaction can obviously improve the magnetic properties of films. Heat treatment can improve magnetic properties. It has more remarkable influence on the magnetic properties of thefilms deposited at lower temperature. The magnet can betten the magnetic properties of films at room temperature. |